Located at Block E6 of the NUS engineering campus, E6NanoFab is an integrated research and development facility that includes class 10, class 100, class 1000 and class 10,000 cleanrooms; as well as dry and wet labs all under one roof, occupying a total space size of 2746 square meter.

It is equipped with state-of-the-art micro and nanotechnology fabrication and metrology tool sets integrated with full flow of electronic prototyping processes.

The one-stop research center serves to streamline and facilitate cutting-edge multidisciplinary research activities.

We support the activities of more than 20 principal investigators, 120 research staff and students; 75 process and characterization tools; as well as industrial partner projects. The centre is supported by a dedicated team of process engineers and facility staff.


To enable state-of-the art research and development facility which includes world-class nanofabrication technologies; serving as a premier university level hub to further develop nanoscale device structures by combining technologies and materials within a single device.


Our vision is to lead in multi-disciplinary nanoscale technology research for scientific and engineering breakthrough applications that drive change and improve lives.


In our constant quest to enhance the transformative educational experience and to prepare our future-ready graduates in the globally interconnected economy, we are strengthening our research profiles that will not only place NUS Engineering on the world map of engineering education, but also foster collaborative research efforts with industry for the translational R&D that create economic impact.

Singapore is home to some of the biggest microelectronics and semiconductor players. The establishment of these global electronics manufacturing players has given rise to a strong presence of electronic support companies across assembly and test, materials and equipment, manufacturing services and supply chain. Looking ahead, we see the need to support NUS engineering and technology researchers, students and external industry partners with well-equipped facilities for cutting edge research activities.

We have integrated our past Microelectronics Technology Devices facilities under one roof. The consolidation is important strategically as we amalgamate our resources and talent pool to grow the research capability for many years to come. The University has invested to build E6NanoFab, which includes state-of-the-art cleanroom facilities and processing capabilities to facilitate a wide-range of advanced research in nanotechnology, flexible electronics, spintronics, quantum and semiconductor technologies.

With its fabrication, metrology capabilities and process development support expertise, we are confident that E6NanoFab is well-positioned to enable NUS and its industrial partners to bring innovative ideas from concepts to validation and translation.



E6NanoFab comprises 12 clusters which are under the supervision of the respective cluster lead professors.

Cluster lead
Overall Cleanroom Facility, Chemical and Safety ZHU Chun Xiang Associate Professor, Electrical and Computer Engineering
Lithography and Patterning, Class 10 Cleanroom Vivian NG Associate Professor, Electrical and Computer Engineering
Etching, Class 100 Cleanroom Vincent LEE Associate Professor, Electrical and Computer Engineering
Deposition, Class 100 Cleanroom Aaron THEAN Professor, Electrical and Computer Engineering
Deposition, Class 1000 Cleanroom ANG Kah Wee Associate Professor, Electrical and Computer Engineering
Magnetics, Class 100 Cleanroom YANG Hyunsoo Associate Professor, Electrical and Computer Engineering
Metrology, Class 1000 Cleanroom
Electrical Test, Dry Lab
GONG Xiao Assistant Professor, Electrical and Computer Engineering
Class 10,000 Cleanroom
General Dry Lab
General Wet Lab
CHIM Wai Kin Associate Professor, Electrical and Computer Engineering
Characterization, Dry Lab WU Yi Hong Professor, Electrical and Computer Engineering
Metrology, Dry Lab Anjam KHURSHEED Associate Professor, Electrical and Computer Engineering