The level 2 wet lab is a critical zone that involves the usage of acid, solvent and high temperature equipments.

E-Beam Evaporator

 

E-Beam Evaporation System for Metal Deposition (OSEC)

Model: Edward Auto 306 Turbo

Substrate size: Irregular to standard 8”dia wafer.
Metals:  Aluminum, Nickel, Titanium, Gold, Gold-Germanium, Palladium and Platinum.

Crucibles: Intermetallic-IML, Graphite liner-GL and ThickWall Graphite Liner-TWGL.

Availability: To be advised

Location: E6-02-09, Wet Lab.

Contact: e6nanofab@nus.edu.sg

Wet Process Facility
  • Acid Wet Bench
  • Solvent Wet Bench
  • Baking Oven
  • DI Water System