Electrical Test
E6NanoFab is equipped with current and capacitance measurement tools to meet the needs of most wafer testing applications
System Overview
Fast, accurate, reliable, and automatic sheet resistivity testing
Technical Specification
- Sheet Resistance measurement via 4 Point Probe
- Automatic measurement range selection
- Extractable data via excel spreadsheet
- Jandel Eng Probe head with Tungsten carbine needle tips
- Measuring range – 10.0 μohm·cm ∼ 200.0 kohm·cm
Location: Level 1 Class 100 Cleanroom
Contact: e6nanofab@nus.edu.sg
Provides for semiconductor device characterization and analysis at ambient environment.
Capabilities
Accommodate up to 4″ diameter samples. It has four adjustable needle probes for testing devices and circuits on wafers. Outboard electronics may include C-V measurement, current or voltage sources.
Contact: e6nanofab@nus.edu.sg
The Agilent Semiconductor parameter analyzer (SPA) conducts standard test routines for p-n junctions, CMOS, MOSFET, diodes and etc.
Location: E6-03-02, Metrology
Availability: To be advised
Contact: e6nanofab@nus.edu.sg
IV and CV measurement for electronic devices.
Features
- The maximum Current: 100 mA.
- The maximum Voltage: 40 V.
- The smallest pad that can probe: 30 um X 30 um.
Contact: e6nanofab@nus.edu.sg
IV and CV measurement for electronic devices.
Features
- The maximum Current: 100 mA.
- The maximum Voltage: 40 V.
- The smallest pad that can probe: 20 um X 20 um.
Contact: e6nanofab@nus.edu.sg