L2 Dry Lab
The level 2 dry lab is equipped with 3 evaporation systems for metalisation.
E6-02-08
Contact: e6nanofab@nus.edu.sg
Edward Evaporation System for
Metal Deposition 
Model: Edward Auto 306 Turbo
Substrate size:
Irregular to standard 8”dia wafer
Metals:
Aluminum, Nickel, Titanium, Gold, Gold-Germanium, Palladium and Platinum.
The Application:
The heating is carried out by passing a large current
through a filament container (tungsten boat or material
coated tungsten rod), which has a finite electrical resistance.
Model: JEOL JEE420T
System Overview
The JEE-420T is used for thin film coating and is a simple tool to operate.
It is primarily used for preparation of various samples that are suitable for observation using SEM
(Scanning Electron Microscopes) and TEM (Transmission Electron Microscopes).
However, it can also be used for various other applications, not limited to preparing bond pads for wire bonding.
Metals:
Aluminum, Nickel, Titanium, Gold and Gold-Germanium.
Crucibles:
Intermetallic-IML, Graphite liner-GL and ThickWall Graphite Liner-TWGL.
Substrate size:
Irregular to standard 8”dia wafer
The Application
The heating is carried out by passing a large current through a filament container (tungsten boat or material coated tungsten rod), which has a finite electrical resistance.