L2 Wet Lab

The level 2 wet lab is a critical zone that involves the useage of acid, solvent and high temperature equipments.

Location
E6-02-09

Contact: e6nanofab@nus.edu.sg

Wet Process

Acid Wet Bench            Solvent Wet Bench

Baking Oven                   DI Water System

E-Beam Evaporator

E-Beam Evaporation System for Metal Deposition

Model: Edward Auto 306 Turbo

Substrate size:
Irregular to standard 8”dia wafer.

Metals:
Aluminum, Nickel, Titanium, Gold, Gold-Germanium, Palladium and Platinum.

Crucibles:
Intermetallic-IML, Graphite liner-GL and ThickWall Graphite Liner-TWGL.

Availability:
will be available in 3rd quarter of 2019.