Secondary Electron Energy Spectroscopy in the Scanning Electron Microscope

Join us on November 18th at 8pm (Singapore) at this virtual event with author Professor Anjam Khursheed and exert panellists Cornelia Rodenburg and Filip Mika on the development and prospect of secondary electron (SE) energy spectroscopy in the scanning electron microscope.

Topics to be covered include:

  • advantages of SE energy spectroscopy over conventional SE imaging
  • the need for designing precision electron energy spectrometers for the SEM
  • new possibilities for semiconductor characterization, i.e. the mapping of pn junction space-charge regions, in-situ monitoring native oxide thickness and measuring the local dopant concentration/conductivity of bulk semiconductor wafers
  • the potential of SE energy spectroscopy to become a quantitative material analysis companion technique to Energy Dispersive Spectroscopy (EDS) for low voltage SEM (LVSEM)
  • the capture of bulk valence band density of states information in a SEM for the first time
  • challenges of implementing SE energy spectroscopy into high resolution in-lens SEM columns
  • challenge of providing SE energy spectroscopy as an in-built feature to future SEMs, either by making suitable energy analyzer attachments accessories available, or by redesigning SEM columns.

Professor Khursheed’s new book Secondary Electron Energy Spectroscopy in the Scanning Electron Microscope will be available from mid November 2020.

About the Book

This book will be of interest to all those who use the Scanning Electron Microscope (SEM) for materials science applications and to SEM development engineers. It highlights the advantages of capturing the energy spectrum of a SEM’s low energy scattered electrons, the ones that are normally used for topographic imaging. The book shows how secondary electron energy spectroscopy can transform the SEM into a powerful analytical tool that can map valuable materials science information on to the Nanoscale: analysing and identifying materials, acquiring bulk valence band density of states information, capturing dopant density distributions in semiconductor specimens, and mapping surface charge distributions. It demonstrates how SE energy spectroscopy has the potential to become a powerful companion to Energy Dispersive Spectroscopy (EDS) for low voltage SEM (LVSEM) applications. This book is suitable for Physicists, Chemists, Materials Scientists, advanced graduate students, and scanning electron microscope designers

About the Speaker 

Anjam Khursheed is a professor in the department of Electrical and Computer Engineering department at the National University of Singapore. He is also cluster lead of The Metrology Lab @ E6NanoFab. He is a specialist in making new developments for the SEM, and the work reported in this book represents the culmination of four decades of research work in the subject of SE energy spectroscopy in the SEM.

Anjam Khursheed obtained his BSC in Electronics and Physics from the University of Edinburgh, Scotland, in 1979, and went on to do a PHD there in the subject of Electron Energy Spectrometers for the Scanning Electron Microscope. From 1984 to 1987, he worked as an applied physicist at the High Energy Particle Physics Accelerator organization of CERN in Geneva, Switzerland (1984-7), where he worked on the design of high frequency electromagnetic cavities. He also worked on the subject of atomic clocks at the Politecnico di Torino, Italy (1992-1994). In 1995, Anjam Khursheed went to work at the National University of Singapore

The Expert Panellists

Cornelia Rodenburg (neé Schönjahn) is Senior Lecturer in Materials Science and Engineering (MSE) and currently holds an Early Career EPSRC Fellowship during which her group has pioneered secondary hyperspectral imaging (SEHI).  Prior to this she was Lecturer and held a Royal Society Dorothy Hodgkin Fellowship at University of Sheffield. Her first post-doctoral post was at the University of Cambridge in the Department of Materials Science & Metallurgy.  Her work has always been centered on developing a fundamental understanding of materials and systems often requiring innovative electron microscopy in combination with modeling.  She has worked on semiconductors, steel, glass and ceramic coatings. Her current main interest is Secondary Electron Hyperspectral Imaging, applied to polymers or complex  organic/inorganic materials in order to increase materials reliability or extract key information required for the reverse engineering of natural materials such as spider silk.

Cornelia Rodenburg was one of the first to propose SE energy filtering for in-lens SEMs around 18 years ago, and has recently carried out SE spectral analysis in the Helios NanoLab SEM.

 

Filip Mika is head of Microscopy and Microanalysis group at the Institute of Scientific Instruments in the Institute of Scientific Instruments of the Czech Academy of Sciences. He is an expert in the field of Monte Carlo simulation of the interaction of the beams with matter and signal detection. His skills include secondary electron spectroscopy, very-low-energy and non-charging electron microscopy methods. Filip focuses on imaging of insulators (organic crystals pigments), nano-composites, and dopants in semiconductors.

In September 2017, Filip Mika held three day international workshop on the subject of “Energy-Filtered Electron Microscopy” in Brno, Czech Republic, where he promoted the subject of SE energy spectroscopy in the SEM. He has performed SE energy filtering in state-of-the-art in-lens SEMs, such as the Magellan 400 FEG SEM.

The Panel Moderator

Han Weiding is a postdoctoral researcher in the Department of Electrical & Computer Engineering at the National University of Singapore. The topic of his PhD thesis was in the subject of SE energy spectroscopy inside the SEM, which he completed in 2019 under the supervision of Anjam Khursheed. Many of the experimental results reported in the book were either obtained by Han Weiding as part of his PhD thesis work, or subsequently as a postdoctoral researcher.

This virtual event is free to attend. Due to limited capacity, please register early to avoid disappointment.

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